IP Library › Granted Patent US 5,376,499
Granted Patent Utility
US 5,376,499 · App. 07/880,139

Highly heat-resistant positive resists comprising end-capped hydroxypolyamides

Inventors: Albert Hammerschmidt, Siegfried Birkle, Hellmut Ahne
Patented Case View Patent ↗
Granted: Dec 27, 1994 Filed: May 7, 1992
Inventors
Albert Hammerschmidt
Siegfried Birkle
Hellmut Ahne
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,376,499
App. No.
07/880,139
Filed
1992-05-07
Granted
1994-12-27
Kind
A