IP Library Granted Patent US 5,376,791
Granted Patent Utility
US 5,376,791 · App. 08/021,481

Secondary ion mass spectometry system

Inventors: Lynwood W. Swanson, John M. Lindquist, Milton C. Jaehnig, Joseph Puretz
Patented Case View Patent ↗
Granted: Dec 27, 1994 Filed: Feb 22, 1993
Inventors
Lynwood W. Swanson
John M. Lindquist
Milton C. Jaehnig
Joseph Puretz
Assignee (at issue)
FEI Company

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Quick Facts
Patent No.
US 5,376,791
App. No.
08/021,481
Filed
1993-02-22
Granted
1994-12-27
Kind
A