IP Library Granted Patent US 5,376,883
Granted Patent Utility
US 5,376,883 · App. 07/984,921

Analysis of integrated circuit operability using a focused ion beam

Inventor: Takashi Kaito
Patented Case View Patent ↗
Granted: Dec 27, 1994 Filed: Dec 4, 1992
Inventor
Takashi Kaito
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,376,883
App. No.
07/984,921
Filed
1992-12-04
Granted
1994-12-27
Kind
A