Granted Patent
Utility
US 5,377,451 · App. 08/021,215
Wafer polishing apparatus and method
Inventors:
Fabrizio Leoni, Marco Morganti, Luigi Vesco
Patented Case
View Patent ↗
Granted: Jan 3, 1995
Filed: Feb 23, 1993
Inventors
Fabrizio Leoni
Marco Morganti
Luigi Vesco
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.