Granted Patent
Utility
US 5,378,330 · App. 08/059,466
Method for polishing micro-sized structures
Inventors:
Hong Li, Stephen D. Senturia, David Volfson
Patented Case
View Patent ↗
Granted: Jan 3, 1995
Filed: May 7, 1993
Inventors
Hong Li
Stephen D. Senturia
David Volfson
Assignee (at issue)
Panasonic Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.