Granted Patent
Utility
US 5,378,802 · App. 07/753,526
Method for removing impurities from resist components and novolak resins
Inventor:
Kenji Honda
Patented Case
View Patent ↗
Granted: Jan 3, 1995
Filed: Sep 3, 1991
Inventor
Kenji Honda
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.