Granted Patent
Utility
US 5,380,398 · App. 07/982,194
Method for selectively etching AlGaAs
Inventor:
Lawrence E. Smith
Patented Case
View Patent ↗
Granted: Jan 10, 1995
Filed: Nov 25, 1992
Inventor
Lawrence E. Smith
Assignee (at issue)
AT&T Bell Laboratories
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.