Granted Patent
Utility
US 5,382,541 · App. 07/935,765
Method for forming recessed oxide isolation containing deep and shallow trenches
Inventors:
George Bajor, Anthony L. Rivoli
Patented Case
View Patent ↗
Granted: Jan 17, 1995
Filed: Aug 26, 1992
Inventors
George Bajor
Anthony L. Rivoli
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.