Granted Patent
Utility
US 5,383,000 · App. 07/981,051
Partial coherence varier for microlithographic system
Inventors:
Paul Francis Michaloski, William N. Partlo
Patented Case
View Patent ↗
Granted: Jan 17, 1995
Filed: Nov 24, 1992
Inventors
Paul Francis Michaloski
William N. Partlo
Assignee (at issue)
Federal Signal Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.