Granted Patent
Utility
US 5,383,971 · App. 07/849,488
Differential pressure CVD chuck
Inventor:
Steven C. Selbrede
Patented Case
View Patent ↗
Granted: Jan 24, 1995
Filed: Mar 11, 1992
Inventor
Steven C. Selbrede
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.