IP Library › Granted Patent US 5,384,021
Granted Patent Utility
US 5,384,021 · App. 08/104,277

Sputtering apparatus

Inventor: Michael J. Thwaites
Patented Case View Patent ↗
Granted: Jan 24, 1995 Filed: Aug 10, 1993
Inventor
Michael J. Thwaites
Assignee (at issue)
The BOC Group plc

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 5,384,021
App. No.
08/104,277
Filed
1993-08-10
Granted
1995-01-24
Kind
A