Granted Patent
Utility
US 5,385,689 · App. 08/084,414
Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom
Inventors:
Glenn M. Tom, James V. McManus
Patented Case
View Patent ↗
Granted: Jan 31, 1995
Filed: Jun 29, 1993
Inventors
Glenn M. Tom
James V. McManus
Assignee (at issue)
Novapure Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.