Granted Patent
Utility
US 5,387,495 · App. 07/864,375
Sequential multilayer process for using fluorinated hydrocarbons as a dielectric
Inventors:
James Cheng Lee, Arshad Ahmad, Chune Lee, Myrna E. Castro, Francisca Tung
Patented Case
View Patent ↗
Granted: Feb 7, 1995
Filed: Apr 6, 1992
Inventors
James Cheng Lee
Arshad Ahmad
Chune Lee
Myrna E. Castro
Francisca Tung
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.