Granted Patent
Utility
US 5,389,575 · App. 08/039,718
Self-aligned contact diffusion barrier method
Inventors:
Maw-Rong Chin, Gary Warren, Kuan-Yang Liao
Patented Case
View Patent ↗
Granted: Feb 14, 1995
Filed: Mar 29, 1993
Inventors
Maw-Rong Chin
Gary Warren
Kuan-Yang Liao
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.