Granted Patent
Utility
US 5,391,909 · App. 07/959,833
Detection of electron-beam scanning of a substrate
Inventors:
Faik S. Ozdemir, Richard B. Cottine
Patented Case
View Patent ↗
Granted: Feb 21, 1995
Filed: Oct 13, 1992
Inventors
Faik S. Ozdemir
Richard B. Cottine
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.