Granted Patent
Utility
US 5,393,375 · App. 08/171,965
Process for fabricating submicron single crystal electromechanical structures
Inventors:
Noel C. MacDonald, Zhoying L. Zhang, Gyorgy A. Porkolab
Patented Case
View Patent ↗
Granted: Feb 28, 1995
Filed: Dec 22, 1993
Inventors
Noel C. MacDonald
Zhoying L. Zhang
Gyorgy A. Porkolab
Assignee (at issue)
Cornell Research Foundation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.