Granted Patent
Utility
US 5,393,574 · App. 08/144,367
Method for forming light absorbing aluminum nitride films by ion beam deposition
Inventor:
Frank C. Sulzbach
Patented Case
View Patent ↗
Granted: Feb 28, 1995
Filed: Nov 2, 1993
Inventor
Frank C. Sulzbach
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.