Granted Patent
Utility
US 5,393,641 · App. 08/254,676
Radiation-sensitive resin composition
Inventors:
Toshio Ito, Miwa Sakata
Patented Case
View Patent ↗
Granted: Feb 28, 1995
Filed: Jun 6, 1994
Inventors
Toshio Ito
Miwa Sakata
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.