Granted Patent
Utility
US 5,397,680 · App. 08/249,972
Positive photoresist having improved processing properties
Inventors:
Ulrich Schadeli, Norbert Munzel
Patented Case
View Patent ↗
Granted: Mar 14, 1995
Filed: May 27, 1994
Inventors
Ulrich Schadeli
Norbert Munzel
Assignees (at issue)
Ciba-Geigy
QCG Microelectronics
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.