Granted Patent
Utility
US 5,399,415 · App. 08/071,260
Isolated tungsten microelectromechanical structures
Inventors:
Liang Chen, Noel C. MacDonald
Patented Case
View Patent ↗
Granted: Mar 21, 1995
Filed: Jun 4, 1993
Inventors
Liang Chen
Noel C. MacDonald
Assignee (at issue)
Cornell Research Foundation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.