Granted Patent
Utility
US 5,399,463 · App. 08/227,831
Process of photopatterning a substrate with a positive photoresist composition containing a diazoquinone photosensitizer
Inventor:
Hans-Joachim Merrem
Patented Case
View Patent ↗
Granted: Mar 21, 1995
Filed: Apr 14, 1994
Inventor
Hans-Joachim Merrem
Assignee (at issue)
Ciba-Geigy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.