Granted Patent
Utility
US 5,399,528 · App. 08/037,476
Multi-layer fabrication in integrated circuit systems
Inventors:
Jacques Leibovitz, Maria L. Cobarruviaz, Kenneth D. Scholz, Clinton Chao
Patented Case
View Patent ↗
Granted: Mar 21, 1995
Filed: Mar 24, 1993
Inventors
Jacques Leibovitz
Maria L. Cobarruviaz
Kenneth D. Scholz
Clinton Chao
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.