Granted Patent
Utility
US 5,403,406 · App. 08/064,013
Silicon wafers having controlled precipitation distribution
Inventors:
Robert J. Falster, Giancarlo Ferrero, Graham Fisher, Massimiliano Olmo, Marco Pagani
Patented Case
View Patent ↗
Granted: Apr 4, 1995
Filed: May 13, 1993
Inventors
Robert J. Falster
Giancarlo Ferrero
Graham Fisher
Massimiliano Olmo
Marco Pagani
Assignee (at issue)
MEMC Electronic Materials S.P.A.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.