Granted Patent
Utility
US 5,403,685 · App. 07/954,505
Lithographic process for producing small mask apertures and products thereof
Inventors:
David A. Vidusek, Hiroki Tabuchi
Patented Case
View Patent ↗
Granted: Apr 4, 1995
Filed: Sep 29, 1992
Inventors
David A. Vidusek
Hiroki Tabuchi
Assignees (at issue)
SHARP KABUSHIKI KAISHA
Sharp Microelectronics Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.