Granted Patent
Utility
US 5,403,701 · App. 08/085,848
Method of forming small geometry patterns on piezoelectric membrane films
Inventors:
Paul Lum, Belinda Kendle, Michael Greenstein
Patented Case
View Patent ↗
Granted: Apr 4, 1995
Filed: Jun 30, 1993
Inventors
Paul Lum
Belinda Kendle
Michael Greenstein
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.