IP Library › Granted Patent US 5,404,079
Granted Patent Utility
US 5,404,079 · App. 08/097,230

Plasma generating apparatus

Inventors: Mitsuhiro Ohkuni, Masafumi Kubota, Noboru Nomura, Ichiro Nakayama, Tokuhiko Tamaki
Patented Case View Patent ↗
Granted: Apr 4, 1995 Filed: Jul 27, 1993
Inventors
Mitsuhiro Ohkuni
Masafumi Kubota
Noboru Nomura
Ichiro Nakayama
Tokuhiko Tamaki
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 5,404,079
App. No.
08/097,230
Filed
1993-07-27
Granted
1995-04-04
Kind
A