Granted Patent
Utility
US 5,404,111 · App. 08/077,392
Probe apparatus with a swinging holder for an object of examination
Inventors:
Shigeoki Mori, Wataru Karasawa, Hitoshi Fujihara, Masaru Suzuki, Keiichi Yokota
Patented Case
View Patent ↗
Granted: Apr 4, 1995
Filed: Jun 17, 1993
Inventors
Shigeoki Mori
Wataru Karasawa
Hitoshi Fujihara
Masaru Suzuki
Keiichi Yokota
Assignees (at issue)
Tokyo Electron Limited
Tokyo Electron Yamanashi Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.