Granted Patent
Utility
US 5,405,734 · App. 08/036,449
Method for correcting a patterned film using an ion beam
Inventor:
Kazuo Aita
Patented Case
View Patent ↗
Granted: Apr 11, 1995
Filed: Mar 24, 1993
Inventor
Kazuo Aita
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.