Granted Patent
Utility
US 5,405,791 · App. 08/317,280
Process for fabricating ULSI CMOS circuits using a single polysilicon gate layer and disposable spacers
Inventors:
Aftab Ahmad, Tyler Lowrey
Patented Case
View Patent ↗
Granted: Apr 11, 1995
Filed: Oct 4, 1994
Inventors
Aftab Ahmad
Tyler Lowrey
Assignee (at issue)
Micron Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.