Granted Patent
Utility
US 5,407,529 · App. 08/027,728
Method for manufacturing semiconductor device
Inventor:
Tetsuya Homma
Patented Case
View Patent ↗
Granted: Apr 18, 1995
Filed: Mar 4, 1993
Inventor
Tetsuya Homma
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.