Granted Patent
Utility
US 5,407,534 · App. 08/166,058
Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal
Inventor:
Randhir P. S. Thakur
Patented Case
View Patent ↗
Granted: Apr 18, 1995
Filed: Dec 10, 1993
Inventor
Randhir P. S. Thakur
Assignee (at issue)
Micron Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.