Granted Patent
Utility
US 5,407,551 · App. 08/090,916
Planar magnetron sputtering apparatus
Inventors:
Peter A. Sieck, Milan R. Kirs, Terry A. Trumbly
Patented Case
View Patent ↗
Granted: Apr 18, 1995
Filed: Jul 13, 1993
Inventors
Peter A. Sieck
Milan R. Kirs
Terry A. Trumbly
Assignee (at issue)
The BOC Group Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.