IP Library › Granted Patent US 5,407,861
Granted Patent Utility
US 5,407,861 · App. 08/068,139

Metallization over tungsten plugs

Inventors: Maria Santina Marangon, Andrea Marmiroli, Giorgio Desanti
Patented Case View Patent ↗
Granted: Apr 18, 1995 Filed: May 26, 1993
Inventors
Maria Santina Marangon
Andrea Marmiroli
Giorgio Desanti
Assignee (at issue)
SGS-Thomson Microelectronics S.A.

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Quick Facts
Patent No.
US 5,407,861
App. No.
08/068,139
Filed
1993-05-26
Granted
1995-04-18
Kind
A