Granted Patent
Utility
US 5,409,569 · App. 08/128,419
Etchant, detergent and device/apparatus manufacturing method
Inventors:
Hitoshi Seki, Satoshi Miyazawa, Tadahiro Ohmi, Kazuko Ogino, Akira Abe, Tsutomu Nakamura, Hirofumi Fukui, Yasuhiko Kasama
Patented Case
View Patent ↗
Granted: Apr 25, 1995
Filed: Sep 28, 1993
Inventors
Hitoshi Seki
Satoshi Miyazawa
Tadahiro Ohmi
Kazuko Ogino
Akira Abe
Tsutomu Nakamura
Hirofumi Fukui
Yasuhiko Kasama
Assignee (at issue)
ALPS ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.