IP Library › Granted Patent US 5,412,129
Granted Patent Utility
US 5,412,129 · App. 08/261,572

Stabilization of precursors for thin film deposition

Inventor: Stephen A. DiCarolis
Patented Case View Patent ↗
Granted: May 2, 1995 Filed: Jun 17, 1994
Inventor
Stephen A. DiCarolis

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Quick Facts
Patent No.
US 5,412,129
App. No.
08/261,572
Filed
1994-06-17
Granted
1995-05-02
Kind
A