IP Library Granted Patent US 5,412,980
Granted Patent Utility
US 5,412,980 · App. 07/926,175

Tapping atomic force microscope

Inventors: Virgil B. Elings, John A. Gurley
Patented Case View Patent ↗
Granted: May 9, 1995 Filed: Aug 7, 1992
Inventors
Virgil B. Elings
John A. Gurley
Assignee (at issue)
Digital Instruments, Inc.

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Quick Facts
Patent No.
US 5,412,980
App. No.
07/926,175
Filed
1992-08-07
Granted
1995-05-09
Kind
A