Granted Patent
Utility
US 5,413,670 · App. 08/089,210
Method for plasma etching or cleaning with diluted NF.sub.3
Inventors:
John Giles Langan, Scott Edward Beck, Brian Felker
Patented Case
View Patent ↗
Granted: May 9, 1995
Filed: Jul 8, 1993
Inventors
John Giles Langan
Scott Edward Beck
Brian Felker
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.