Granted Patent
Utility
US 5,423,558 · App. 08/216,848
Semiconductor wafer carrier and method
Inventors:
Joe Koeth, Melvin J. Hoffman, Paul David Jackson
Patented Case
View Patent ↗
Granted: Jun 13, 1995
Filed: Mar 24, 1994
Inventors
Joe Koeth
Melvin J. Hoffman
Paul David Jackson
Assignee (at issue)
IPEC/Westech Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.