Granted Patent
Utility
US 5,423,716 · App. 08/178,530
Wafer-handling apparatus having a resilient membrane which holds wafer when a vacuum is applied
Inventor:
Alan Strasbaugh
Patented Case
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Granted: Jun 13, 1995
Filed: Jan 5, 1994
Inventor
Alan Strasbaugh
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.