Granted Patent
Utility
US 5,425,964 · App. 08/278,762
Deposition of multiple layer thin films using a broadband spectral monitor
Inventors:
William H. Southwell, Randolph L. Hall
Patented Case
View Patent ↗
Granted: Jun 20, 1995
Filed: Jul 22, 1994
Inventors
William H. Southwell
Randolph L. Hall
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.