Granted Patent
Utility
US 5,426,558 · App. 08/213,459
Anti-stick electrostatic chuck for a low pressure environment
Inventor:
Arthur Sherman
Patented Case
View Patent ↗
Granted: Jun 20, 1995
Filed: Mar 14, 1994
Inventor
Arthur Sherman
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.