Granted Patent
Utility
US 5,429,983 · App. 08/297,155
Method of manufacturing semiconductor device
Inventors:
Yutaka Takizawa, Ken-ichi Yanai
Patented Case
View Patent ↗
Granted: Jul 4, 1995
Filed: Aug 29, 1994
Inventors
Yutaka Takizawa
Ken-ichi Yanai
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.