Granted Patent
Utility
US 5,429,993 · App. 08/216,217
Semiconductor accelerometer and method of its manufacture
Inventor:
Bruce A. Beitman
Patented Case
View Patent ↗
Granted: Jul 4, 1995
Filed: Mar 21, 1994
Inventor
Bruce A. Beitman
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.