Granted Patent
Utility
US 5,433,013 · App. 08/126,824
Fixture for alignment of vacuum nozzles on semiconductor manufacturing equipment
Inventor:
Glenn Woodhouse
Patented Case
View Patent ↗
Granted: Jul 18, 1995
Filed: Sep 24, 1993
Inventor
Glenn Woodhouse
Assignee (at issue)
Micron Custom Manufacturing Services Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.