Granted Patent
Utility
US 5,435,682 · App. 08/255,114
Chemical vapor desposition system
Inventors:
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro, Wiebe B. deBoer, Albert E. Ozias
Patented Case
View Patent ↗
Granted: Jul 25, 1995
Filed: Jun 7, 1994
Inventors
Richard Crabb
McDonald Robinson
Mark Hawkins
Dennis L. Goodwin
Armand P. Ferro
Wiebe B. deBoer
Albert E. Ozias
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.