Granted Patent
Utility
US 5,435,880 · App. 08/137,292
Plasma processing apparatus
Inventors:
Mitsuaki Minato, Atsushi Matsushita, Shinichi Omori, Jun Kanamori
Patented Case
View Patent ↗
Granted: Jul 25, 1995
Filed: Oct 14, 1993
Inventors
Mitsuaki Minato
Atsushi Matsushita
Shinichi Omori
Jun Kanamori
Assignees (at issue)
TOKYO OHKA KOGYO CO., LTD.
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.