Granted Patent
Utility
US 5,437,739 · App. 08/229,501
Etch control seal for dissolved wafer micromachining process
Inventor:
Kenneth Maxwell Hays
Patented Case
View Patent ↗
Granted: Aug 1, 1995
Filed: Apr 19, 1994
Inventor
Kenneth Maxwell Hays
Assignee (at issue)
Rockwell International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.