Granted Patent
Utility
US 5,438,022 · App. 08/165,872
Method for using low dielectric constant material in integrated circuit fabrication
Inventors:
Derryl D. J. Allman, Kenneth P. Fuchs, Gayle W. Miller, Samuel C. Gioia
Patented Case
View Patent ↗
Granted: Aug 1, 1995
Filed: Dec 14, 1993
Inventors
Derryl D. J. Allman
Kenneth P. Fuchs
Gayle W. Miller
Samuel C. Gioia
Assignees (at issue)
AT&T Global Information Solutions Company
Hyundai Electronics America
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.