IP Library Granted Patent US 5,438,467
Granted Patent Utility
US 5,438,467 · App. 07/967,359

Negative pressure air bearing design

Inventors: Lee K. Dorius, John M. Harker, Laurence S. Samuelson
Patented Case View Patent ↗
Granted: Aug 1, 1995 Filed: Oct 28, 1992
Inventors
Lee K. Dorius
John M. Harker
Laurence S. Samuelson
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 5,438,467
App. No.
07/967,359
Filed
1992-10-28
Granted
1995-08-01
Kind
A