IP Library Granted Patent US 5,440,121
Granted Patent Utility
US 5,440,121 · App. 08/174,292

Scanning probe microscope

Inventors: Masatoshi Yasutake, Nobutaka Nakamura
Patented Case View Patent ↗
Granted: Aug 8, 1995 Filed: Dec 28, 1993
Inventors
Masatoshi Yasutake
Nobutaka Nakamura
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 5,440,121
App. No.
08/174,292
Filed
1993-12-28
Granted
1995-08-08
Kind
A